Make in India Partners
Semiconductor
Nano Technology
Gas Cabinet – कवच
The challenge to deliver gases and chemicals with impurities less than ppb is significant for many industries. At KAS, this is done seamlessly to deliver purity and enable safety through the molecule lifecycle.
Application
- Configurable for safe delivery of CORT gases(Corrosive, Oxidizing, Reactive and Toxic)
Testing and Validation
- Helium leak tested exceeding 1 X 10-9 He L/sec
- Sub-micron Particle count
- Trace Moisture<10 ppb
- Trace Oxygen<10 ppb
Version
- Manual
- Semi-Automatic
- Automatic
Compliance
- SEMI S2 Standard
- CE Mark
# of gases
- Single gas
- Multi Gas
- Auto Changeover Panel configuration
Foot Print
- 750mm(W) X 600 mm(D) X 2175 mm(H)
Additional
- OEM’s Pre-start up training program
Utilities requirements
- UHP Nitrogen @ 7 bar for Vacuum Gen / Purge
- Gen N2 @ 7 bar for Z Purge
- Electricity 110-240 VAC, 50/60 Hz
- Exhaust 300 cfm to 450 cfm @ 1.5″ WC
- Water for Sprinklers
Standard Configuration
- Conical filters, Pigtail
- Tied diaphragm regulators, Vacuum Gen,
- Safety Relief v/v, Rupture Disc, Emergency Shut Off v/v
- Panel access window with wire mesh glass
- Controller – Life Safety System, TCP/IP compatible
- Wax Coated UL approved Sprinkler, Enclosure 11G powder coated
Options
- ESO Valve, Excess Flow switch, Process Gas MFC or MFM w/Totaliser
- Flash Back arrestor, Gas Leak Detector, UVIR, Vent Scrubber, Temperature Switch, Exhaust Sensor
- Vacuum Generator, Purge Gas Purifier, Weigh Scale, Heat Tracing, Block Heaters / Cylinder heating Jackets, Weigh Scale, N2 Purge Panel
- Pneumatic Valves, Pressure Transmitter, Controller-Life Safety System, HMI with password protection, Z Purge
- Inbuilt Valve Manifold for multiple gas outlets, Electronic Regulators
- Motorised exhaust dampers
- TGM Service / AMC Service
- Third party SEMI S2 Certification
- FMEA/HAZOP
