Make in India Partners
Semiconductor
Nano Technology
Chemical Delivery Unit – रसायन वाहक
The challenge to deliver gases and chemicals with impurities less than ppb is significant for many industries. At KAS, this is done seamlessly to deliver purity and enable safety through the molecule lifecycle.
Application
- Configurable for safe delivery of high purity Acids, Bases & Solvents
Testing and Validation
- Hydro tested with DI water as per ASME Std.
Version
- Semi-Automatic
- Automatic
Compliance
- Conforms to SEMI-S2
Additional
- OEM’s Pre-start up training program
Footprint
- 1400mm(W) X 500 mm(D) X 1000 mm(H)
# of Chemicals
- Single Drum/IBC
- Dual Drum/IBC
- Auto Barrel Change-over on Dual Systems
Utilities requirements
- CDA 30 SCFM @ 90 psi or 51 Nm³/hr @ 6 barg
- Gen N2 0.5 LPM @ 0.5 to 1 bar for blanketing
- Electricity 110-240 VAC, 50/60 Hz
- Exhaust 300 cfm @ 2″ WC
- DI Water Peak 20 LPM @ 4 barg
- Cabinet Drain Gravity
Options
- Choice of materials:
FM4910 (ECTFE, CPVC, PVDF) or PP or SS.
- Remote EMO Shut Down
- Seamless Integration with Wet Process
- Multiple chemical outlet valves
- High-flow switch, Pressure & flow indicator on pump outlet
- Flow Path Configurations ¾”, 1”, or 1 ¼”
- Glove Ports at Ergonomic Height
- PP Containment Enclosure for drums, IBC’s and day tank
- TCM Service / AMC Service
Standard configuration
- PTFE AODD Pump
- PFA or PTFE valves
- PFA tubing and fittings
- PFA filter housings
- KAS Chem Control Software to Control individual I/O valves
- Visual & Audible Alarms
- Exhaust Monitoring & N2 Purged Electronics
- Internal Spill, Leak Detection and door interlocks
- DI/N2 maintenance services for pumps and filters
- Chemical resistant Metal Components
