Make in India Partners
Semiconductor
Nano Technology
GAS Supply Panel – प्रदय
The challenge to deliver gases and chemicals with impurities less than ppb is significant for many industries. At KAS, this is done seamlessly to deliver purity and enable safety through the molecule lifecycle.
Application
- Configurable for safe delivery of CORT gases(Corrosive, Oxidizing, Reactive and Toxic)
Compliance
- SEMI S2 Standard
Version
- Manual
- Semi-Automatic
- Automatic Version
Testing and Validation
- Helium leak tested exceeding 1 X 10-9 He L/sec
- Sub-micron Particle count
- Trace Moisture<10 ppb
- Trace Oxygen<10 ppb
Configuration
- 3 Value / 5 Value configuration
Foot Print
- 300mm X 300mm / 300mm X 450mm
Standard Configuration
- Conical Filters
- Pigtail
- Tied diaphragm regulators
- Safety Relief Value
Options
- Emergency Shut Off Value, Excess Flow switch
- Flash Back arrestor, Gas Leak Detector
- Vacuum Generator, Purifier, Weigh Scale, Heat Tracing
- Pneumatic Values, Pressure Transmitter Controller, Life Safety System
